By mean of molecular beam epitaxy (MBE) equipped with a reftexion high-energy electron diffraction (RHEED) technique. the authors have chosen an intermediate and appropriate substrate temperature of 130°C to reproducibly synthetize high-Tc Ge1-xMnx nanocolumns phase. Laser Pulse Atom Probe Tomography (LP-APT) technique have been used to determine at atomic scale the chemical composition inside nanocolumns and also in the surrounding diluted matrix. The Mn concentration inside nanocolumns is found to be highly inhomogeneous, it is about 20 percent at the bottom and can increase up to ~40 percent in the top near the surface region. The Mn concentration In the matrix is about 0.25 percent at the surface and can reach a highest value of ~1 percent in regions close to the interface.