Thông tin nhà nghiên cứu KH&CN

Vibration characteristic during machining various materials using a 4-axis milling machine

A Self-Locking Electrostatic Microgripper

Nonlinear Displacement of the Electrothermal V-Shaped Actuator

Improving Critical Frequency of the Electrothermal V-Shaped Actuator Using the Particle Swarm Optimization Algorithm

Single mask and low voltage electrothermal micromotor

Vi chấp hành tĩnh điện kiểu răng lược và các ứng dụng.

Thiết kế và chế tạo các bộ vi chấp hành dựa trên công nghệ vi cơ điện tử MEMS

"Influence of Shape Factor of a Beam Cross-Section on a Heat Transfer Process of the Electrothermal V-Shaped Micro Actuators". JST: Smart Systems and Devices Volume 33, Issue 1, January 2023, 064-071

“Improving Displacement of Silicon V-shaped Electrothermal Microactuator Using Platinum Sputter Deposition Process”. (ISI). Vol. 40, (2023). Online 2 Feb. 2023

“Safe working condition and optimal dimension of the electrothermal V-shaped actuator”, Microsystem Technologies (SCI-Q2). Vol. 28, Issue 7 (2022). pp 1673-1685.

“Single Mask and Low Voltage of Micro Gripper Driven by Electrothermal V – Shaped Actuator”

“STABLE WORKING CONDITION AND CRITICAL DRIVING VOLTAGE OF THE ELECTROTHERMAL V-SHAPED ACTUATOR”

“A numerical study of hollow water drop breakup during freezing“, Physics of Fluids (SCI-Q1), 2021. Vol. 33, Issue 11, 112110. https://doi.org/10.1063/5.0071795

Study and Design of Micro Gripper Driven by Electrothermal V–Shaped Actuator”, JST: Smart Systems and Devices Vol. 31, Issue 1, (2021), pp 108-115. ISSN: 2734-9373

"A new structure of Tesla coupled nozzle in synthetic jet micro-pump", Sensors and Actuators A (Nov. 2020). Volume 315, 112296

"A FORCE MEASURING MICROSYSTEM BASES ON ELECTROTHERMAL V-SHAPED ACTUATOR", Vietnam Journal of Mechanics (VJM). Vol.42, No. 4 (2020). pp 355-362. DOI: 10.15625/0866-7136/14823

“Larger displacement of silicon electrothermal V-shaped actuator using surface sputtering process”, Microsystem Technologies (SCI). Vol. 27, No. 5 (2021). pp 1985-1991.

"Numerical study of rheological behaviors of a compound droplet in a conical nozzle". International Journal of Heat and Fluid Flow. Vol. 85, (October 2020). 108655. 16p

"Numerical study of a compound droplet moving toward a rigid wall in an axisymmetric channel", International Journal of Heat and Fluid Flow (SCI-Q1), Vol. 82 (April 2020), 108542.

Heat transfer model and critical driving frequency of electrothermal V-shaped actuators.

Fabrication of Polymeric Micro Structures Using Improved Hot Embossing Technique

"Iterative Learning Control for V-Shaped Electrothermal Microactuator", Electronics (SCIE). Vol. 8 (12), 2019. Online. DOI: https://www.mdpi.com/2079-9292/8/12/1410

"Impact of design parameters on working stability of the electrothermal V-shaped actuator", Microsystem Technologies (SCI). Vol. 26, Issue 5(2020). pp 1479-1487.

ANGULAR RATE SENSING BY CIRCULATORY VORTEX FLOW: DESIGN, SIMULATION AND EXPERIMENT. Transducers 2019 - EUROSENSORS XXXIII Berlin, GERMANY (SCOPUS), 23-27 June, 2019. pp 1961-1964.

"Deformation and breakup of a double-core compound droplet in an axisymmetric channel", International Journal of Heat and Mass Transfer (SCI-Q1), Vol. 135 (2019). pp 796-810.

"Trapezoidal-shaped Electrostatic Comb-drive Actuator with Large Displacement and High Driving Force Density". Microsystem Technologies (SCI). Vol. 25, Issue 8 (2019). pp 3111-3118.

“Influence of the driving frequency and equivalent parameters on displacement amplitude of electrostatic linear comb actuator”, Vietnam Journal of Mechanics (VJM). Vol. 40, No. 4 (2018), pp 397-406.

”Influence of the driving frequency on electrostatic linear comb actuator displacement amplitude”, International Conference on Engineering Research and Applications (ICERA), Thainguyen 1-2 December, 2018, Vietnam. pp 380-389.

"Influence of the side etching effect in DRIE on performance of electrostatic linear comb-drive actuators", Microsystem Technologies (SCI), Vol. 24, Issue 5 (2018). pp 2215-2222

"Jet flow in a circulatory miniaturized system using ion wind". MECHATRONICS (SCI-Q1). Vol. 47 (2017), pp 126-133.

"Nghiên cứu ảnh hưởng của tải trọng nhỏ đến hệ số ma sát của cặp vật liệu Silic - Silic dùng trong hệ thống vi cơ điện tử"

"Điều khiển phản hồi vị trí bộ kích hoạt tịnh tiến ứng dụng cho vi bơm kiểu xy lanh"

“Electrode Geometry in Bipolar Discharge Ion Wind Generator”

"Modeling and Force Analysis of an Electrothermal Micro Gripper with Amplification Compliant Mechanism"

"Development of New Electrostatic Micro Cam System Driven by Elastic Wings". Microsystem Technologies (SCI), Vol. 23, Issue 12 (2017); pp 5669-5675.

"Vi Động Cơ Tĩnh Điện Dẫn Động Bằng Cánh Mềm".

“Nghiên cứu lực đẩy và điều khiển phản hồi vị trí bộ kích hoạt tịnh tiến nhằm ứng dụng cho vi bơm kiểu xy lanh”.

“Cải tiến và mô phỏng vi động cơ quay kiểu điện nhiệt “.

"A micro transmission system based on SOI-MEMS technology: Improvement and Characteristics", Microsystem Technologies (SCI), Vol. 23, Issue 8 (2017). pp 3237-3243

"Phân tích quá trình va chạm trong vi động cơ điện-nhiệt dùng phương pháp mô phỏng tức thời"

“Thiết kế, chế tạo vi động cơ đường kính 2,5mm dựa trên công nghệ MEMS”, Journal of Science and Technology, No. 108, (9/2015). Trang 26-32.

"Tính toán thiết kế vi tay kẹp kiểu tĩnh điện", Tạp chí KHKT-Học viện Kỹ thuật Quân sự. Số 168 (6/2015). Trang 183-191.

"A micro transmission system based on combination of micro elastic structures and ratchet mechanism", Microsystem Technologies (SCI), Vol. 23, Issue 2(2017). pp 381-387.

“Studying on fatigue strength of cantilever beam structure in mems components”, Journal of Science and Technology, No. 82A, (2011), pp 82-89

"Study of valveless electromagnetic micropump by volume-of-fluid and OpenFOAM", Japanese Journal of Applied Physics (SCI), Vol. 54, Issue 5 (2015).

"DESIGN AND PERFORMANCE OF A HIGH LOADING ELECTROSTATIC MICRO LINEAR MOTOR", Microsystem Technologies (SCI), Vol. 21, Issue 11 (2015). pp 2469-2474

“Chế tạo, đo đạc và kiểm tra đặc tính của bộ kích hoạt nhiệt kiểu dầm chữ V dẫn động motor hai chiều”, Tạp chí Khoa học và Công nghệ (Journal of Science and Technology), Tập 52, số 1A (2014), trang 136-142

“Micro mô tơ dẫn động bằng các bộ kích hoạt tĩnh điện quay”, Tạp chí Khoa học và Công nghệ (Journal of Science and Technology), Tập 52, số 1A (2014), trang 127-135

"MICRO CAM SYSTEM DRIVEN BY ELECTROSTATIC COMB-DRIVE ACTUATORS BASED ON SOI-MEMS TECHNOLOGY", Microsystem Technologies (SCI), Volume 21, Issue 3 (2015), pp 699-706.

"Design and calculation of a bending testing system for micro silicon beam", Tuyển tập hội nghị tự động hóa toàn quốc lần thứ 2. Đà Nẵng 22-23/11/2013. pp 571-576

"DESIGN AND FABRICATION OF A MICRO CAM MECHANISM BASED ON ELECTROSTATIC COMB-DRIVE ACTUATORS", 3rd IFToMM International Symposium on Robotics and Mechatronics, 2–4 October 2013, Singapore, pp 211-219

"DESIGN AND FABRICATION OF THE MICRO BI-DIRECTIONAL MOTOR DRIVEN BY ELECTRO-THERMAL ACTUATORS", Tạp chí KHCN Số 94 (2013), trang 37-43

"DESIGN AND FABRICATION OF THE TRAPEZOIDAL ELECTROSTATIC COMB-DRIVE ACTUATOR",Vietnam Journal of Mechanics, VAST, Vol. 34, No. 4 (2012), pp 261 – 269.

“A novel bi-directional micro rotational motor driven by V-shaped electrothermal actuators”, Journal of Science and Technology, No. 88, (2012), pp 73-78.

“Development of the micro rotational motor and application in gearing systems”, Journal of Science and Technology, No. 88, (2012), pp 79-83.

"A micro gearing system based on a ratchet mechanism and electrostatic actuation", Microsystem Technologies (SCI), Vol.19, Issue 2 (2013), pp 261-267.

“Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators”, Journal of Micromechanics and Microengineering (SCI), Vol. 22, No. 1 (2012).

"Multimodule Micro Transportation System Based on Electrostatic Comb-Drive Actuator and Ratchet Mechanism", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (SCI-Q1), VOL. 20, NO. 1,(2011), pp 140-149

"A novel micro transportation system with fast movement of a micro container based on electrostatic actuation and a ratchet mechanism", Journal of Micromechanics and Microengineering (SCI) Vol. 20, No. 11 (2010).

“Fluidic device with pumping and sensing functions for precise flow control”, Sensors and Actuators B (SCI-Q1),Vol. 150 (2010), pp 819-824

"Thiết kế và chế tạo hệ thống Mini-robot với các Micro-container dựa trên công nghệ Vi Cơ Điện tử (MEMS)", Tạp chí Khoa học Đại học Quốc gia Hà Nội, Tập 26, Số 2 (2010), trang 83-88

"Design and Fabrication of Micro Linear Motor (MLM) Based on MEMS Technology", Tạp chí Khoa học và Công nghệ (Journal of Science and Technology), Tập 48, số 2A (2010), trang 759-764

"Tangential and Perpendicular Driving Micro Transmission Systems Based on Ratchet Mechanism and Electrostatic Actuator", Transducers2009 - IEEE, Denver, Colorado, USA (21 – 25th June 2009), pp 45-48

"Micro Robot System (MRS) with Movement of Micro-car Driven by Electrostatic Comb-Drive Actuators", Proceeding of the first International Symposium on Robotics and Mechatronics – ISRM2009, Hanoi, Vietnam (21-23rd Sep. 2009), pp 226-230

"Micro Robot System with Moving Micro-car Driven by Electrostatic Comb-Drive Actuators", Microsystem Technologies (SCI), Vol.16, No.4,(2010), pp 505-510

"Design and Fabrication of Micro-car Used for Mini-Robot System Based on MEMS Technology", Proceedings of the 11th Vietnamese-German Seminar (VGS11), Nhatrang 31st March-5th April, 2008

"A Novel Micro Robot System- MRS Based on Electrostatic Actuators", Proceedings of the 4th Vietnam conference on Mechatronics (VCM2008), Danang 24, 25th Oct. 2008

"A Si Micro Conveyer System Based on Electrostatic Comb-Drive Actuators", 2005 International Symposium on Micro-Nano Mechatronics and Human Science MHS2005, Nagoya, Japan (7-9th November 2005)

"A Novel Micro Conveyer System Based on Ratchet Mechanism and Electrostatic Comb-Drive Actuators", Asia-Pacific Conference of Tranducers and Micro-Nano Technology – Singapore, IEEE D-31, (APCOT 25-28th June 2006)

"Fabrication and Characterization of Smooth Si Mold for Hot Embossing Process", 23rd Sensor Symposium 2006, Kagawa, Japan (5, 6th October 2006), pp 185-188, 10/2006

"Straight Movement of Micro Containers Based on Motions of Electrostatic Comb-Drive Actuators", COE Symposium, Ritsumeikan University, Shiga, Japan (12, 13th October 2006), 10/2006

"Development of an Electrostatic Micro Transportation System (MTS) with Strider-like Movement of Micro Carts", Proceedings of the International Symposium on Micro-Nano Mechatronics and Human Science – IEEE, MHS2007, Nagoya, Japan (11-14th November 2007), pp 333-338, 11/2007

"Design and Fabrication of Polymer Electrostatic Comb-Drive Actuators and Application in Micro Conveyer Systems", The 22nd Sensor Symposium-SMAS2005, Tokyo, Japan (20, 21st October 2005), pp 199-202, 10/2005

"A Si Micro Conveyer System with Straight Displacement Based on Reciprocating Motions of Ratchet Mechanism and Electrostatic Comb-Drive Actuators", International Symposium on Flexible Automation - ISFA2006, Osaka, Japan (10-12th July 2006

"Design and Fabrication of Polymer Electrostatic Comb-Drive Actuators for Micro Conveyer Systems", IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 126, No. 7 (2006), pp 306-311. Scopus.

"Straight Movement of Micro Containers Based on Ratchet Mechanism and Electrostatic Comb-Drive Actuators", Journal of Micromechanics and Microengineering (SCI), Vol. 16, No. 12 (2006), pp 2532-2538. England, 12/2006

"Fabrication and Characterization of Smooth Si Mold for Hot Embossing Process", IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 127, No. 3 (2007), pp 187-191. Scopus.

"Micro Transportation System (MTS) with Large Movement of Containers Driven by Electrostatic Comb-Drive Actuators", Journal of Micromechanics and Microengineering (SCI) Vol. 17, No. 10 (2007), pp 2125-2131. England, 10/2007

"Novel Micro Transportation Systems Based on Ratchet Mechanism and Electrostatic Actuators", Transducers 2007 - IEEE, Lyon, France (10 – 14th June 2007), Vol. 1, pp 451-454, 6/2007

"A Fully Functional Micro Transportation System with Strider-Like Movement of Micro Containers", Proceedings of the IEEE – MEMS’08 (13-17th Jan. 2008), Tucson, Arizona, USA, pp 50-53

"Micro Ratcheting Transmission Systems Based on Electrostatic Actuators", Proceedings of the International Symposium on Micro-Nano Mechatronics and Human Science – IEEE, MHS2008, Japan (Best Paper Award), 11/2008

Nghiên cứu ảnh hưởng của các thông số hình/động lực học tới hoạt động của vi kích hoạt và vi mô tơ MEMS

Nghiên cứu các vi cơ cấu ứng dụng trong các linh kiện MEMS

Vi mô tơ quay dựa trên công nghệ MEMS

Nghiên cứu động cơ tự nâng sử dụng đệm từ trường

Nghiên cứu hệ MEMS Robot kiểu tĩnh điện

Chương trình COE (Center of Excellent)